Inside the machine: How a High NA system generates EUV light | ASML
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Inside the machine: How a High NA system generates EUV light | ASML
How does a High NA system create extreme ultraviolet (EUV) light? In this video, Greet Storms, head of product management for High NA EUV at ASML, explains how EUV light is generated and used for imaging in advanced chipmaking. From flattening a 30-micron droplet of tin into a pancake to creating a plasma 40 times hotter than the surface of the ...
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